1.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Oka,N. ; Watanabe,K. ; Ohmori,K. ; Inoue,M. ; Iguchi,K.
Pub. info.: 19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California.  Part1  pp.288-296,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3873
2.

Conference Proceedings

Conference Proceedings
Kobayashi,S. ; Watanabe,K. ; Ohmori,K.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  4186  pp.801-809,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186