1.

Conference Proceedings

Conference Proceedings
Lee,S.-J. ; Yoo,J.-Y. ; Kim,Y.-C. ; Kim,H. ; Nam,J.-L. ; Chung,U.-I. ; Kang,G.-W. ; Han,W.-S.
Pub. info.: Metrology, inspection, and process control for microlithography XIV : 28 February - 2 March 2000, San Clara, California.  pp.195-204,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3998
2.

Conference Proceedings

Conference Proceedings
Kim,Y.-C. ; Yeo,G.-S. ; Shin,H.-S. ; Kim,H. ; Kang,H.-Y. ; Chung,U-I.
Pub. info.: Optical microlithography XI : 25-27 February 1998, Santa Clara, California.  pp.629-639,  1998.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3334