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28 results

Conference Proceedings

1. Evaluation of partial coherent imaging using the transfer function in immersion lithography [6154-103]

Jung, M. R. ; Kwak, E. A. ; Oh, H.-K. ; Shim, S.-B. ; Choi, N.-R. ; Kim, J.-S.

Pub. info.:	Optical Microlithography XIX. pp.61542R-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6154

Conference Proceedings

2. The Dependence of Cu Removal Efficiency on the Initial Cu Concentration of Si Surface

Kim, J.-S. ; Morita, H. ; Joo, J.-D. ; Ohmi, T.

Pub. info.:	ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology. pp.199-210, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-3

Conference Proceedings

3. PASSIVATION OF Cu PARTICLES ON Si SUBSTRATE BY FOM(HF+O3- UPW) SOLUTION

Morita, H. ; Joo, J.-D. ; Messoussi, R. ; Kawada, K. ; Kim, J.-S. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.143-150, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

4. THE EFFECT OF SURFACE DAMAGE DUE TO Si INPLANTATION ON ADSORPTION AND DESORPTION OF Cu ON Si SURFACE -

Kim, J.-S. ; Morita, H. ; Joo, J.-D. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.151-158, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

Conference Proceedings

5. Improved characteristics of rainbow defects with novel wafer edge exposure technique

Shim, K.-C. ; Kim, M.-S. ; Lee, E.-S. ; Lee, C.-S. ; Gil, M.-G. ; Kim, B.-H. ; In, J.-S. ; Yoon, T.-B. ; Kim, J.-S.

Pub. info.:	Metrology, Inspection, and Process Control for Microlithography XVI. Part Two pp.919-926, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4689

Conference Proceedings

6. Fabrication and Characteristics of High Speed Implant-Confined, Index-Guided, Lateral-current, 850 nm Vertical Cavity Surface Emitting Lasers*

Park, K.-Y. ; Chol, H.-H. ; Kim, H.-K. ; Kim, J.-S. ; Kwon, S.-Y. ; Choi, S.-Y.

Pub. info.:	State-of-the-art program on compound semiconductors XXXVI and wide bandgap semiconductors for photonic and electronic devices and sensors II : proceedings of the international symposia. pp.213-224, 2002. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2002-3

Conference Proceedings

7. Selective Etching of Intermetallic Inclusions from the Surface of Aluminum AA 2024 Alloys

Chen, U. ; Buttry, D. ; Williams, M. ; Malmberg., J. ; Kim, J.-S.

Pub. info.:	Corrosion and corrosion prevention of low density metals and alloys : proceedings of the International Symposium. pp.29-40, 2000. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2000-23

Conference Proceedings

8. Highly anisotropic etching of phase-shift masks using ICP of CF4-SF6-CHF3 gas mixtures

Choi, S.-J. ; Cha, H.-S. ; Yoon, S.-Y. ; Kim, Y.-D. ; Lee, D.-H. ; Kim, J.-M. ; Kim, J.-S. ; Min, D.-S. ; Jang, P.-J. ; Chang, B.-S. ; Kwon, H.-J. ; Choi, B.-Y. ; Choi, S.-S. ; Jeong, S.H.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology IX. pp.303-311, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4754

Conference Proceedings

9. Polymeric multimode waveguide arrays for one- and two-dimensional optical interconnects (Invited Paper)

Kim, J.-J. ; Kim, J.-S.

Pub. info.:	Linear and Nonlinear Optics of Organic Materials IV. pp.141-151, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5517

10.

Conference Proceedings

10. COMPARISON OF CLEANING EFFICIENCIES OF NOBEL METALS ON Si SURFACES BETWEEN O3-UPW AND SPM

Joo, J.-D. ; Kim, J.-S. ; Morita, H. ; Ohmi, T.

Pub. info.:	Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.280-288, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-35

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