1.

Conference Proceedings

Conference Proceedings
Roman, P. ; Lee, D.D. ; Wang, J. ; Mumbauer, P. ; Grant, R. ; Tower, J. ; Kamieniecki, E. ; Lukasiak, L. ; Ruzyllo, aud J.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.207-212,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
2.

Conference Proceedings

Conference Proceedings
Roman, P. ; Lee, D. ; Mumbauer, P. ; Grant, R. ; Kamieniecki, E. ; Ruzyllo, J.
Pub. info.: Low and high dielectric constant materials : materials science, processing, and reliability issues : proceedings of the fifth international symposium.  pp.187-192,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-5