1.

Conference Proceedings
Conference Proceedings
1. Enhanced hydrogenation in polycrystalline Si thin films using ultrasound treatment
Ostapenko,S. ; Koshka,Y. ; Jastrzebski,L. ; Smeltzer,R.K.
Pub. info.: Active matrix liquid crystal displays technology and applications : 10-11 February, 1997, San Jose, California.  pp.176-183,  1997.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3014
2.

Conference Proceedings
Conference Proceedings
2. Photoluminescence Defect Diagnostics in Poly-Si Thin Films
Ostapenko,S.S. ; Savchuk,A.U. ; Nowak,G. ; Lagowski,J. ; Jastrzebski,L.
Pub. info.: Proceedings of the 18th International Conference on Defects in Semiconductors : ICDS-18, Sendai, Japan, July 23-28, 1995.  pp.1897-1902,  1995.  Zurich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 196-201
3.

Conference Proceedings
Conference Proceedings
3. Contact potential difference methods for full wafer characterization of Si/Si02 interface defects induced by plasma processing (Invited Paper)
Edelman,P. ; Savchouk,A. ; Wilson,M. ; Jastrzebski,L. ; Lagowski,J.J. ; Nauka,K. ; Ma,S. ; Hoff,A.M. ; DeBusk,D.K.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.126-136,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
4.

Conference Proceedings
Conference Proceedings
4. Real-time preparation-free imaging of mobile charge in SiO2
Jastrzebski,L. ; Edelman,P. ; Lagowski,J.J. ; Hoff,A.M. ; Savchouk,A. ; Persson,E.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III.  pp.207-217,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877
5.

Conference Proceedings
Conference Proceedings
5. Evaluation of contaminant-induced charge from oxide chemical-mechanical polish
Burke,P. ; Lowell,J.K. ; Jastrzebski,L.
Pub. info.: Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing II.  pp.27-37,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2638
6.

Conference Proceedings
Conference Proceedings
6. Small signal ac-surface photovoltage technique for noncontact monitoring of near-surface doping for IC-processing
Marinskiy,D.N. ; Lagowski,J.J. ; Wilson,M. ; Jastrzebski,L. ; Santiesteban,R. ; Elshot,K.
Pub. info.: Process Control and Diagnostics.  pp.72-77,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182
7.

Conference Proceedings
Conference Proceedings
7. Effect of Fe and Cu contamination on the reliability of ultrathin gate oxides
D'Amico,J. ; Jastrzebski,L. ; Wilson,M. ; Savtchouk,A.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.124-135,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884