1.

Conference Proceedings

Conference Proceedings
D'Amico,J. ; Jastrzebski,L. ; Wilson,M. ; Savtchouk,A.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.124-135,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884
2.

Conference Proceedings

Conference Proceedings
Edelman,P. ; Savchouk,A. ; Wilson,M. ; Jastrzebski,L. ; Lagowski,J.J. ; Nauka,K. ; Ma,S. ; Hoff,A.M. ; DeBusk,D.K.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.126-136,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
3.

Conference Proceedings

Conference Proceedings
Marinskiy,D.N. ; Lagowski,J.J. ; Wilson,M. ; Jastrzebski,L. ; Santiesteban,R. ; Elshot,K.
Pub. info.: Process Control and Diagnostics.  4182  pp.72-77,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4182