1.

Conference Proceedings

Conference Proceedings
Kariya, M. ; Yamanaka, E. ; Tanaka, S. ; Ikeda, T. ; Yamaguchi, S. ; Itoh, M. ; Kobayashi, H. ; Kawashima, T. ; Narukawa, S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.550-555,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
2.

Conference Proceedings

Conference Proceedings
Yamaguchi, S. ; Itoh, M. ; Ikeda, T. ; Miyano, Y. ; Mitsui, T. ; Amma, M. ; Horikawa, S.
Pub. info.: 23rd Annual BACUS Symposium on Photomask Technology.  pp.607-618,  2003.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5256
3.

Conference Proceedings

Conference Proceedings
Kariya, M. ; Yamanaka, E. ; tanaka, S. ; Ikeda, T. ; Yamaguchi, S. ; Hashimoto, K. ; Itoh, M. ; Kobayashi, H. ; Kawashima, T. ; Narukawa, S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921M-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992