1.

Conference Proceedings

Conference Proceedings
Hashimoto, K. ; Fujise, H. ; Nojima, S. ; Ito, T. ; Ikeda, T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XI.  pp.471-480,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5446
2.

Conference Proceedings

Conference Proceedings
Kariya, M. ; Yamanaka, E. ; tanaka, S. ; Ikeda, T. ; Yamaguchi, S. ; Hashimoto, K. ; Itoh, M. ; Kobayashi, H. ; Kawashima, T. ; Narukawa, S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921M-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
3.

Conference Proceedings

Conference Proceedings
Hashimoto, K. ; Ito, T. ; Ikeda, T. ; Nojima, S. ; Inoue, S.
Pub. info.: Optical Microlithography XVI.  Part Two  pp.1156-1165,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040