1.

Conference Proceedings
Conference Proceedings
1. Monitoring of Mobile Sodium Ions in SiQ Using Corona Charging
Stevie,F.A. ; Persson,E. ; DeBusk,D.K. ; Savchuk,A. ; Hoff,A.M. ; Edelman,P. ; Lagowski,J.
Pub. info.: Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.357-364,  1997.  Pennington, NJ.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3322
2.

Conference Proceedings
Conference Proceedings
2. Sequential COCOS and SPV Metrology and Its Application to IC Process Monitoring
Hoff,A.M. ; DeBusk,D.K.
Pub. info.: Analytical and diagnostic techniques for semiconductor materials, devices and processes : joint proceedings of the symposia on ALTECH 99, satellite symposium to ESSDERC 99, Leuven, Belgium [and] the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices.  pp.351-364,  1999.  Pennington, N.J..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3895
3.

Conference Proceedings
Conference Proceedings
3. Mobile charge testing of sodium-contaminated thermal oxides using corona temperature stressing
Hoff,A.M. ; DeBusk,D.K.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing.  pp.26-34,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3215
4.

Conference Proceedings
Conference Proceedings
4. Real-time preparation-free imaging of mobile charge in SiO2
Jastrzebski,L. ; Edelman,P. ; Lagowski,J.J. ; Hoff,A.M. ; Savchouk,A. ; Persson,E.
Pub. info.: Optical characterization techniques for high-performance microelectronic device manufacturing III.  pp.207-217,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2877
5.

Conference Proceedings
Conference Proceedings
5. COCOS oxide film characterization and monitoring
Hoff,A.M. ; DeBusk,D.K. ; Schanzer,R.W.
Pub. info.: In-Line Methods and Monitors for Process and Yield Improvement.  pp.207-215,  1999.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3884
6.

Conference Proceedings
Conference Proceedings
6. Contact potential difference methods for full wafer characterization of Si/Si02 interface defects induced by plasma processing (Invited Paper)
Edelman,P. ; Savchouk,A. ; Wilson,M. ; Jastrzebski,L. ; Lagowski,J.J. ; Nauka,K. ; Ma,S. ; Hoff,A.M. ; DeBusk,D.K.
Pub. info.: In-Line Characterization Techniques for Performance and Yield Enhancement in Microelectronic Manufacturing II :23-24 September 1998 Santa Clara, California.  pp.126-136,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3509
7.

Conference Proceedings
Conference Proceedings
7. Injection molding of plastic optics:the basics
Hoff,A.M.
Pub. info.: Optical Engineering Midwest '95.  Part1  pp.147-150,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2622
8.

Conference Proceedings
Conference Proceedings
8. Basic considerations for injection molding of plastic optics
Hoff,A.M.
Pub. info.: Design, fabrication, and applications of precision plastic optics : 23-24 October, 1995, Philadelphia, Pennsylvania.  pp.2-5,  1995.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2600