1.

Conference Proceedings

Conference Proceedings
W. M. Lytle ; H. Shin ; D. N. Ruzic
Pub. info.: Metrology, inspection, and process control for microlithography XXI.  6518  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6518
2.

Conference Proceedings

Conference Proceedings
D. N. Ruzic ; R. Raju ; J. Sporre ; H. Shin ; W. M. Lytle
Pub. info.: Lithography Asia 2008.  1  pp.714006-1-714006-12,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7140