1.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Xu, D. ; Chen, J. ; Cai, B. ; Ding, G.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.147-152,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
2.

Conference Proceedings

Conference Proceedings
Wang, L. ; Chen, J. ; Xu, D. ; Cai, B.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.153-160,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
3.

Conference Proceedings

Conference Proceedings
Cheng, X. ; Xu, D. ; Cai, B. ; Wang, L. ; Chen, J. ; Li, G. ; Xu, S.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.340-345,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601
4.

Conference Proceedings

Conference Proceedings
Chen, J. ; Cai, B. ; Wang, L. ; Xu, D. ; Cheng, X.
Pub. info.: Micromachining and Microfabrication Process Technology and Devices.  pp.298-305,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4601