1.

Conference Proceedings
Conference Proceedings
1. A methodology for the characterization of topography induced immersion bubble defects
Warrick, S. ; Hinnen, P. ; Morton, R. ; Cooper, K. ; Sassoulas, P.-O. ; Depre, J. ; Navarro, R. ; van Haren, R. ; Browning, C. ; Reber, D. ; Megens, H.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.154-163,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
2.

Conference Proceedings
Conference Proceedings
2. Segmented alignment mark optimization and signal strength enhancement for deep trench process
Cui, Y. ; Goodwin, F. ; van Haren, R.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XVIII.  pp.1265-1277,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5375