1.

Conference Proceedings

Conference Proceedings
Kasprowicz, B. S. ; van Adrichem, P. J. M.
Pub. info.: EMLC 2005 : 21st European Mask and Lithography Conference : 31 January-3 February, 2005, Dresden, Germany.  pp.63-68,  2005.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5835
2.

Conference Proceedings

Conference Proceedings
van Adrichem, P. J. M. ; Chacko, M. ; Kasprowicz, B. S.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.109-113,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
3.

Conference Proceedings

Conference Proceedings
Drapeau, M. ; van Adrichem, P. J. M. ; van Look, L. ; Kasprowicz, B. S.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921T-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
4.

Conference Proceedings

Conference Proceedings
van Adrichem, P. J. M. ; Valadez, J. ; Ziger, D. ; Gerold, D.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.380-386,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853
5.

Conference Proceedings

Conference Proceedings
Kasprowicz, B. S. ; van Adrichem, P. J. M. ; Chacko, M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XII.  pp.583-588,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5853