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Conference Proceedings

1. NiSi2-FORMATION BY 6 MeV HIGH DOSE NICKEL IMPLANTATION INTO SILICON

Lindner, J. K. N. ; te Kaat, E. H.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.275-280, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107

Conference Proceedings

2. BURIED SILICON-NITRIDE BY HIGH TEMPERATURE NITROGEN IMPLANTATION

Bussman, U. ; Meerbach, F. H. J. ; te Kaat, E. H.

Pub. info.:	Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A.. pp.479-482, 1988. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	107