Blank Cover Image

Illumination condition and mask bias for 0.15-ヲフm pattern with KrF and ArF lithography

Author(s):
Publication title:
Optical microlithography XII : 17-19 March 1999, Santa Clara, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3679
Pub. Year:
1999
Vol.:
Part2
Page(from):
860
Page(to):
871
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819431530 [0819431532]
Language:
English
Call no.:
P63600/3679
Type:
Conference Proceedings

Similar Items:

Hasegawa,N., Hayano,K., Imai,A., Asai,N., Okazaki,S.

SPIE-The International Society for Optical Engineering

Mulkens,J., Stoeldraijer,J.M., Davies,G., Dierichs,M., Heskamp,B., Moers,M.H., George,R.A., Roempp,O., Glatzel,H., …

SPIE - The International Society for Optical Engineering

Kim,S.-K., Kim,Y.-S., Kim,J.-S., Bok,C.-K., Ham,Y.-M., Baik,K.-H.

SPIE - The International Society for Optical Engineering

Yasuzato,T., Ishida,S., Shioiri,S., Tanabe,H., Kasama,K.

SPIE-The International Society for Optical Engineering

Iwasaki,H., Tanabe,H.

SPIE - The International Society for Optical Engineering

Okoroanyanwu,U., Pike,C., Levinson,H.J.

SPIE - The International Society for Optical Engineering

Oh,S.-C., Kim,Y.-C., Nah,S.-H., Huh,H., Han,S.-B.

SPIE - The International Society for Optical Engineering

Okoroanyanwu,U., Levinson,H.J., Romero,J., Singh,B., Lee,S.-J.

SPIE - The International Society for Optical Engineering

Choi,S.S., Jeon,Y.J., Lyu,J.-S., Yoo,H.J., Fabrizio,E.D., Grella,L., Gentili,M.

SPIE-The International Society for Optical Engineering

Duffey,T.P., Embree,T.J., Ishihara,T., Morton,R.G., Partlo,W.N., Watson,T.A., Sandstrom,R.L.

SPIE-The International Society for Optical Engineering

Hsia,C.-C., Gau,T.-S., Yang,C.-H., Liu,R.-C., Chang,C.-H., Chen,L.-J., Wang,C.-M., Chen,J.F., Smith,B.W., Hwang,G.-W., …

SPIE - The International Society for Optical Engineering

Matsuo,T., Nakazawa,K., Ogawa,T.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12