1.

Conference Proceedings
Conference Proceedings
1. XPS/LEIS Study of High-k Rare Earth (Lu, Yb) Oxides Silicates on Si; The Effect of Annealing on Microstructure Evolution
Zenkevich, A. ; Lebedinskii, Y. ; Scarel, G ; Fanciulli, M
Pub. info.: Defects in high-κ gate dielectric stacks : nano-electronic semiconductor devices.  pp.147-161,  2006.  Dordrecht.  Springer
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 220
2.

Conference Proceedings
Conference Proceedings
2. Phase Transformations in Layered Fe-Si Structures
Fanciulli, M. ; Rosenblad, C. ; Weyer, G. ; Kanel, H. von ; Onda, N. ; Nevolin, V. ; Zenkevich, A.
Pub. info.: Silicide thin films - fabrication, properties, and applications : Symposium held November 27-30, 1995, Boston, Massachusetts, USA.  pp.319-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 402
3.

Conference Proceedings
Conference Proceedings
3. Precursor combinations for ALD of rare earth oxides and silicates-A quantum chemical and x-ray study
Elliott, S. D. ; Scarel, G. ; Wiemer, C. ; Fanciulli, M. ; Lebedinskii, Y. ; Zenkevich, A. ; Fedushkin, I. L.
Pub. info.: EUROCVD-15, fifteenth European Conference on Chemical Vapor Deposition : proceedings of the international symposium.  pp.605-613,  2005.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-09
4.

Conference Proceedings
Conference Proceedings
4. Silicide Formation at HfO2/Si and ZrO2/Si Interfaces Induced by Ar+ Ion Bombardment
Lebedinskii, Yu. ; Zenkevich, A. ; Filatov, D. ; Antonov, D. ; Gushina, J. ; Maximov, G.
Pub. info.: Fundamentals of novel oxide/semiconductor interfaces : symposium held December 1-4, 2003, Boston, Massachusetts, U.S.A..  pp.165-170,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 786