Search records | 東京工業大学附属図書館文献データベース

You can search for articles included in proceedings of international conferences and technical papers which Tokyo Tech Library holds.
Tokyo Tech members can obtain tables of contents of 17,000 foreign journals by SwetScan. Tokyo Tech Library does not cover all of them.
List of Searchable Databases

Clear Form

Search for other sites by same keyword(s).

CiNii Books

NDL Search

WebcatPlus

amazon

カーリル

WorldCat

Filter

Title:

Author:

ISBN / ISSN / Paper No:

Source Title:

Publisher:

Publication Year:

～

Clear Form

Type:

Conference Proceedings

Technical Paper

Academic Journal

Select: Check all | Remove all

Sort order

10 results

Conference Proceedings

1. Hydrostatic pressure treatment techniques for investigation of semiconductor defect structure

Misiuk, A. ; Zaumseil, P.

Pub. info.:	ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands. pp.193-202, 1995. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	95-30

Conference Proceedings

2. ELECTRICAL ACTIVATION OF HEAVILY DOPED ARSENIC IMPLANTED SILICON

Said, J. ; Jaouen, H. ; Ghibaudo, G. ; Stoemenos, I. ; Zaumseil, P.

Pub. info.:	Processing and characterization of materials using ion beams : symposium held November 28-December 2, 1988, Boston, Massachusetts, U.S.A.. pp.599-604, 1989. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	128

Conference Proceedings

3. *DEFECT CONTROL IN Cz SILICON

Kirscht, F. G. ; Kim,. S. B. ; Yeh, J. J. ; Wildes, P. D. ; Zaumseil, P.

Pub. info.:	Defect engineering in semiconductor growth, processing and device technology : symposium held April 26-May 1, 1992, San Francisco, California, U.S.A.. pp.929-944, 1992. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	262

Conference Proceedings

4. Fabrication of High Quality MOS Structures with SiGe Buried Channels for CMOS Applications

Kar, S. ; Zaumseil, P.

Pub. info.:	ULSI Process Integration : proceedings of the International Symposium. pp.178-189, 2001. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2001-2

Conference Proceedings

5. Raman characterization of composition and strain in Si1-xGex/Si heterostructures

Liu, Ran ; Tillack, B. ; Zaumseil, P.

Pub. info.:	Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A.. pp.277-, 2000. Warrendale, Pa.. MRS-Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	591

Conference Proceedings

6. HOW CVD Si/Ge LAYER GROWTH IS CONTROLLED BY EACH ONE OF THE REACTION GAS COMPONENTS

Kuhne, H. ; Kissinger, G. ; Zaumseil, P. ; Hinrich, S. ; Richter, H.

Pub. info.:	Evolution of surface and thin film microstructure : symposium held November 30-December 4, 1992, Boston, Massachusetts, U.S.A.. pp.183-188, 1993. Pittsburgh, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	280

Conference Proceedings

7. Deposition Conditions and Post Treatment of High-k Praseodymium and Lanthanum Oxide Dielectrics

Lippert, G. ; Dabrowski, J. ; Formanek, P. ; Melnik, V. ; Sorge, R. ; Wenger, C. ; Zaumseil, P. ; Mussig, H. J.

Pub. info.:	Dielectrics for nanosystems: materials science, processing, reliability, and manufacturing : proceedings of the First international symposium. pp.115-122, 2004. Pennington, N.J.. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	2004-04

Conference Proceedings

8. Segregation and Diffusion of Sb Compared to As for Ultra-Shallow Implantation Into Silicon

Kruger, D. ; Zaumseil, P. ; Melnik, V. ; Kurps, R. ; Formanek, P. ; Bolze, D.

Pub. info.:	CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A.. pp.167-172, 2003. Warrendale, Pa.. Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	765

Conference Proceedings

9. Self-Diffusion as a Limiting Factor of a-SiGe Crystallization

Edelman, F. ; Raz, T. ; Komem, Y. ; Werner, P. ; Beyer, W. ; Butz, R. ; Zeindl, H. ; Zaumseil, P.

Pub. info.:	Defects and diffusion in silicon processing : symposium held April 1-4, 1997, San Francisco, California, U.S.A.. pp.529-, 1997. Pittsburg, Pa.. MRS - Materials Research Society
Title of ser.:	Materials Research Society symposium proceedings
Ser. no.:	469

10.

Conference Proceedings

10. Lattice Strain and Defects in Epitaxial Silicon Wafers

Kirscht, F. ; Snegirev, B. ; Zaumseil, P. ; Kissinger, G. ; Takashima, K. ; Wildes, P. ; Hennessy, J.

Pub. info.:	Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices. pp.60-67, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-12

Select: Check all | Remove all

Sort order

10 results

Filtering by:

Author: Zaumseil, P.