1.

Conference Proceedings
Conference Proceedings
1. Effect of Filament Material on the Decomposition of SiH4 in Hot Wire CVD of Si-Based Films
Duan, H. L. ; Zaharias, G.A. ; Bent, Stacey F.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.21-30,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715
2.

Conference Proceedings
Conference Proceedings
2. The Use Of Seed Layers In Hot Wire Chemical Vapor Deposition Of Microcrystalline Silicon Films
Zaharias, G.A. ; Mahan, A.H. ; Schropp, R.E.I. ; Xu, Y. ; Williamson, D.L. ; Al-Jassim, M.M. ; Romero, M.J. ; Gedvilas, L.M.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.135-140,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715
3.

Conference Proceedings
Conference Proceedings
3. Microcrystalline Silicon For Solar Cells At High Deposition Rates By Hot Wire CVD
Schropp, R.E.I. ; Xu, Y. ; Iwaniczko, E. ; Zaharias, G.A. ; Mahan, A.H.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2002 : symposium held April 2-5, 2002, San Francisco, California, U.S.A..  pp.623-628,  2002.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 715
4.

Conference Proceedings
Conference Proceedings
4. Identification of Growth Precursors In Hot Wire CVD of Amorphous Silicon Films
Duan, H.L. ; Zaharias, G.A. ; Bent, Stacey F.
Pub. info.: Amorphous and heterogeneous silicon-based films - 2001 : symposium held April 16-20, 2001, San Francisco, California, U.S.A..  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 664