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Environment-Friendly Chemical Mechanical Polishing Slurry for SiC Wafer

Author(s):
Publication title:
Advances in Abrasive Technology XIX
Title of ser.:
Materials science forum
Ser. no.:
874
Pub. Year:
2016
Page(from):
415
Page(to):
422
Pages:
8
Pub. info.:
Aedermannsdorf, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9783035710342 [3035710341]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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