1.
Conference Proceedings
Cameron, J. F. ; Ablaza, S. L. ; Xu, G. ; Yueh, W.
Pub. info.:
Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California . pp.785-799, 1999. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3678
2.
Conference Proceedings
Yueh, W. ; Cao, H. B. ; Thirumala, V. ; Choi, H.
Pub. info.:
Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA . pp.149-161, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5753(1)
3.
Conference Proceedings
Lee, C. -T. ; Jarnagin, N. D. ; Wang, M. ; Gonsalves, k. E. ; Robert, J. M. ; Yueh, W. ; Henderson, C. L.
Pub. info.:
Advances in Resist Technology and Processing XXIII . pp.61532E-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
6153
4.
Conference Proceedings
Thirumala, V. ; Cao, H.B. ; Yueh, W. ; Choi, H. ; Golovkina, V. ; Wallace, J. ; Nealey, P.F. ; Thielman, D. ; Cerrina, F.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.765-772, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
5.
Conference Proceedings
Cao, H.B. ; Yueh, W. ; Rice, B.J. ; Roberts, J. ; Bacuita, T. ; Chandhok, M.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.757-764, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376
6.
Conference Proceedings
Chandhok, M. ; Cao, H. ; Yueh, W. ; Gullikson, E.M. ; Brainard, R.L. ; Robertson, S.A.
Pub. info.:
Emerging Lithographic Technologies VIII . pp.861-868, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5374
7.
Conference Proceedings
Yueh, W. ; Cao, H.B. ; Chandhok, M. ; Lee, S. ; Shumway, M. ; Bokor, J.
Pub. info.:
Advances in Resist Technology and Processing XXI . pp.434-442, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5376