1.

Conference Proceedings

Conference Proceedings
Cameron, J. F. ; Ablaza, S. L. ; Xu, G. ; Yueh, W.
Pub. info.: Microlithography 1999 : advances in resist technology and processing XVI : 15-17 March 1999, Santa Clara, California.  pp.785-799,  1999.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3678
2.

Conference Proceedings

Conference Proceedings
Yueh, W. ; Cao, H. B. ; Thirumala, V. ; Choi, H.
Pub. info.: Advances in resist technology and processing XXII : 28 February-2 March, 2005, San Jose, California, USA.  pp.149-161,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5753(1)
3.

Conference Proceedings

Conference Proceedings
Lee, C. -T. ; Jarnagin, N. D. ; Wang, M. ; Gonsalves, k. E. ; Robert, J. M. ; Yueh, W. ; Henderson, C. L.
Pub. info.: Advances in Resist Technology and Processing XXIII.  pp.61532E-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6153
4.

Conference Proceedings

Conference Proceedings
Thirumala, V. ; Cao, H.B. ; Yueh, W. ; Choi, H. ; Golovkina, V. ; Wallace, J. ; Nealey, P.F. ; Thielman, D. ; Cerrina, F.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.765-772,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
5.

Conference Proceedings

Conference Proceedings
Cao, H.B. ; Yueh, W. ; Rice, B.J. ; Roberts, J. ; Bacuita, T. ; Chandhok, M.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.757-764,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376
6.

Conference Proceedings

Conference Proceedings
Chandhok, M. ; Cao, H. ; Yueh, W. ; Gullikson, E.M. ; Brainard, R.L. ; Robertson, S.A.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.861-868,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374
7.

Conference Proceedings

Conference Proceedings
Yueh, W. ; Cao, H.B. ; Chandhok, M. ; Lee, S. ; Shumway, M. ; Bokor, J.
Pub. info.: Advances in Resist Technology and Processing XXI.  pp.434-442,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5376