1.

Conference Proceedings

Conference Proceedings
Kim,J.-H. ; Oh,S.-H. ; Lee,D.-S. ; Yeo,J.-H. ; Yu,Y.-H. ; Nam,J.-L.
Pub. info.: Optical Microlithography X.  pp.54-65,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3051
2.

Conference Proceedings

Conference Proceedings
Lim,S.-C. ; Kim,B.-G. ; Choi,S.-W. ; Lee,K.-H. ; Cho,H.-J. ; Yu,Y.-H. ; Cho,H.-K. ; Sohn,J.-M.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.301-311,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236
3.

Conference Proceedings

Conference Proceedings
Cha,B.-C. ; Kim,Y.-H. ; Choi,S.-W. ; Yu,Y.-H. ; Sohn,J.-M.
Pub. info.: 17th Annual BACUS Symposium on Photomask Technology and Management.  pp.34-41,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3236