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Aluminum and Electron-Irradiation-Induced Deep Levels in n-Type and p-Type 6H-SiC

Author(s):
Gong, M.
Beling, C. D.
Fung, S.
Brauer, G.
Wirth, H.
Skorupa, W.
You, Z-P.
2 more
Publication title:
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
510
Pub. Year:
1998
Page(from):
455
Pub. info.:
Warrendale, Pa: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994164 [1558994165]
Language:
English
Call no.:
M23500/510
Type:
Conference Proceedings

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