1.

Conference Proceedings
Conference Proceedings
1. SURFACE CHEMISTRY OF SILICON AND GERMANIUM TREATED WITH HYDROFLUORIC ACID SOLUTIONS: SLOW REACTIONS OF PROCESS RESIDUALS
Yota, J. ; Burrows, V.A.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.345-350,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
2.

Conference Proceedings
Conference Proceedings
2. SULFIDATION AND POST-SULFIDATION REACTIONS ON GALLIUM ARSENIDE
Yota, J. ; Burrows, V.A.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.281-286,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
3.

Conference Proceedings
Conference Proceedings
3. ELECTROCHEMICAL AND CHEMICAL SULFIDATION OF GaAs: A SURFACE CHEMICAL STUDY
Yota, J. ; Burrows, V. A.
Pub. info.: Interface dynamics and growth : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.329-334,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 237
4.

Conference Proceedings
Conference Proceedings
4. ELECTROCHEMICAL SULFUR TREATMENTS OF GaAs USING Na2S AND (NH4)2S SOLUTIONS: A SURFACE CHEMICAL STUDY
Yota, J. ; Burrows, V.A.
Pub. info.: Chemical perspectives of microelectric materials III : symposium held November 30-December 3, 1992, Boston, Massachusetts, U.S.A..  pp.105-110,  1993.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 282
5.

Conference Proceedings
Conference Proceedings
5. In Search of Higher Density MIM Capacitor for GaAs RF Applications
Yota, J. ; Ramanathan, R. ; Kwok, K. ; Arreaga, J. ; Ko, T. ; Shao, H.
Pub. info.: State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia.  pp.315-329,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-04
6.

Conference Proceedings
Conference Proceedings
6. Low-k Dielectrics: Implications to Nanoelectronic and Photonic Applications
Zhou, H. ; Shi, F.G. ; Zhao, B. ; Yota, J.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.547-563,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
7.

Conference Proceedings
Conference Proceedings
7. Chemical Mechanical Polishing (CMP) of Undoped and Doped Ceramic and Polymeric lnterlayer Dielectric (ILD) Materials for Microelectronic Applications
Zantye, P.B. ; Kumar, A. ; Yota, J.
Pub. info.: Silicon nitride, silicon dioxide thin insulating films, and other emerging dieletrics VIII : proceedings of the international symposium.  pp.564-580,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-01
8.

Conference Proceedings
Conference Proceedings
8. PASSIVATION OF GaAs BY ELECTROCHEMICAL SULFUR TREATMENTS
Yota, J. ; Burrows, V. A. ; Guha, S.
Pub. info.: Surface chemical cleaning and passivation for semiconductor processing.  pp.163-,  1993.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 315