Ichikawa, M. ; Takeshi, S. ; Yoshioka, N. ; Itagaki, H.
Pub. info.:
Proceedings of the fourth International Conference on Exploration and Utilisation of the Moon, ICEUM 4, 10-14 July 2000, ESTEC, Noordwijk, the Netherlands. pp.155-158, 2000. Noordwijk, The Netherlands. ESA Publications Division
Aizawa, J. ; Yoshioka, N. ; Miyata, M. ; Wakabayashi, Y.
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iSAIRAS '99 : Fifth International Symposium on Artificial Intelligence, Robotics and Automation in Space, ESTEC, Noordwijk, the Netherlands, 1-3 June 1999. pp.63-68, 1999. Noordwijk, Netherlands. ESA Publications Division
Iriki, N. ; Miyazaki, N. ; Homma, M. ; Sato, T. ; Onodera, T. ; Matsuda, T. ; Uga, T. ; Higashino, H. ; Higashikawa, I. ; Yoshioka, N.
Pub. info.:
20th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.60-69, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kuriyama, K. ; Suzuki, T. ; Hirumi, J. ; Yoshioka, N. ; Hojo, Y. ; Kawase, Y. ; Hara, S. ; Hoga, M. ; Watanabe, S.W. ; Inoue, M. ; Kawase, H. ; Kamimoto, T.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.660-671, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Kawase, H. ; Kamimoto, T. ; Ogasawara, H. ; Kuriyama, K. ; Hirumi, J. ; Yoshioka, N.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.638-647, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Matsunawa, T. ; Nosato, H. ; Sakanashi, H. ; Murakawa, M. ; Murata, N. ; Terasawa, T. ; Tanaka, T. ; Yoshioka, N. ; Suga, O. ; Higuchi, T.
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25th Annual BACUS Symposium on Photomask Technology. pp.599254-599254, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Imai, A. ; Yoshioka, N. ; Hanawa, T. ; Narimatsu, ’K. ; Hosono, K. ; Suko, K.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology XII. pp.1-9, 2005. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
19th European Conference on Mask Technology for Integrated Circuits and Microcomponents. pp.220-224, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hagiwara, R. ; Yasaka, A. ; Aita, K. ; Takaoka, O. ; Koyama, Y. ; Kozakai, T. ; Doi, T. ; Muramatsu, M. ; Suzuki, K. ; Sugiyama, Y. ; Matsuda, O. ; Okabe, M. ; Shinohara, S. ; Hasuda, M. ; Adachi, T. ; Morikawa, Y. ; Nishiguchi, M. ; Sato, Y. ; Hayashi, N. ; Ozawa, T. ; Tanaka, Y. ; Yoshioka, N.
Pub. info.:
Photomask and Next-Generation Lithography Mask Technology X. pp.510-519, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering