Hamada, K. ; Hamajima, T. ; Kitano, T. ; Ohnishi, H. ; Yoshino, A.
Pub. info.:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.1395-1405, 1998. Pennington, NJ. Electrochemical Society
Proceedings of the Sixth International Symposium on Silicon-on-Insulator Technology and Devices. pp.312-317, 1994. Pennington, NJ. Electrochemical Society