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43 results

Conference Proceedings

1. Dry etch technology development for NIL template [6283-87]

Yoshida, Y. ; Amano, T. ; Sasaki, S. ; Itoh, K. ; Toyama, N. ; Mohri, H. ; Hayashi, N.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XIII. pp.62833G-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6283

Conference Proceedings

2. Fabrication of microchannels by UV laser ablation

Takahashi, S. ; Suzuki, Y. ; Yoshida, Y.

Pub. info.:	Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.173-176, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4830

Conference Proceedings

3. Creation of carbide in critical CO2 by UV laser

Arai, T. ; Uchida, T. ; Fukuda, N. ; Yoshida, Y. ; Maekawa, T.

Pub. info.:	Fifth International Symposium on Laser Precision Microfabrication : 11-14 May, 2004, Nara, Japan. pp.454-457, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5662

Conference Proceedings

4. Study of YBa2Cu3O7-y Films by Metalorganic Chemical Vapor Deposition Using Liquid Sources

Yoshida, Y. ; Ito, Y. ; Yamada, Y. ; Nagai, H. ; Takai, Y. ; Hirabayashi, I. ; Tanaka, S.

Pub. info.:	Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11. pp.998-1004, 1997. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	97-25

Conference Proceedings

5. Improvement of Plastic Workability of Rolled AZ31 Alloy Sheet by Surface Thermo-Mechanical Treatment

Yoshida, Y. ; Arai, K. ; Kamado, S. ; Kojima, Y.

Pub. info.:	Magnesium-science, technology and applications : proceedings of the International Conference on Magnesium-Science, Technology and Applications September 20-24, 2004, Beijing, China. pp.449-452, 2005. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Title of ser.:	Materials science forum
Ser. no.:	488-489

Conference Proceedings

6. In-field CD uniformity control by altering transmission distribution of the photomask using ultra fast pulsed laser technology [6283-29]

Morikawa, Y. ; Sutou, T. ; Inazuki, Y. ; Adachi, T. ; Yoshida, Y. ; Kojima, K. ; Sasaki, S. ; Mohri, H. ; Hayashi, N. ; Dmitriev, V. ; Oshemkov, S. ; Zait, E. ; Ben-Zvi, G.

Pub. info.:	Photomask and Next-Generation Lithography Mask Technology XIII. pp.62831Y-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6283

Conference Proceedings

7. NIL template making and imprint evaluation [6349-85]

Yoshida, Y. ; Kobiki, A. ; Hiraka, T. ; Yusa, S. ; Sasaki, S. ; Itoh, K. ; Toyama, N. ; Kurihara, M. ; Mohri, H. ; Hayashi, N.

Pub. info.:	Photomask Technology 2006. pp.63492C-, 2006. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	6349

Conference Proceedings

8. 3D micro channels in laminated resins by UV laser ablation

Yoshida, Y.

Pub. info.:	Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany. pp.189-192, 2003. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	5063

Conference Proceedings

9. IN.SITU OBSERVATION OF DIFFUSION AND SEGREGATION OF Fe ATOMS IN Si CRYSTALS AT HIGH TEMPERATURE BY MOSSBAUER SPECTROSCOPY

Yoshida, Y. ; Shimura, F.

Pub. info.:	Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology. pp.984-996, 1998. Pennington, NJ. Electrochemical Society
Title of ser.:	Electrochemical Society Proceedings Series
Ser. no.:	98-1(2)

10.

Conference Proceedings

10. Debris flow velocity estimation: a comparison between grandient-based method and cross- correlation method

Uddin, M.S. ; Inaba, H. ; Yoshida, Y. ; Itakura, Y.

Pub. info.:	Image processing : algorithms and systems : 21-23 January 2002, San Jose, USA. pp.130-138, 2002. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:	Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:	4667

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