1.

Conference Proceedings

Conference Proceedings
Yoon, B.U. ; Jeong, I.K ; Kim, J.Y. ; Lee, J.W. ; Hah, S.R. ; Moon, J.T. ; Lee, S.I.
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.616-624,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
2.

Conference Proceedings

Conference Proceedings
Kondo, S. ; Yoon, B.U. ; Tokitoh, S. ; Namiki, A. ; Misawa, K. ; Inukai, K. ; Sone, S. ; Shin, H.J. ; Matsubara, Y. ; Ohashi, N. ; Kobayashi, N.
Pub. info.: ULSI Process Integration : proceedings of the International Symposium.  pp.385-394,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-06