1.
Conference Proceedings
Yoon, B.U. ; Jeong, I.K ; Kim, J.Y. ; Lee, J.W. ; Hah, S.R. ; Moon, J.T. ; Lee, S.I.
Pub. info.:
Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium . pp.616-624, 1999. Pennington, N. J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-37
2.
Conference Proceedings
Kondo, S. ; Yoon, B.U. ; Tokitoh, S. ; Namiki, A. ; Misawa, K. ; Inukai, K. ; Sone, S. ; Shin, H.J. ; Matsubara, Y. ; Ohashi, N. ; Kobayashi, N.
Pub. info.:
ULSI Process Integration : proceedings of the International Symposium . pp.385-394, 2005. Pennington, N.J.. Electrochemical Society
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2005-06