1.

Conference Proceedings
Conference Proceedings
1. CHARACTERISTICS AND RECOVERY OF Si SURFACES PLASMA ETCHING IN CHF3/C2F6
Park, H.-H. ; Kwon, K.H. ; Koak, B.-H. ; Lee, S.-M. ; Kwon, O-J. ; Kim, B.-W. ; Lee, J.-W. ; Yoo, J.-B. ; Sung, Y.-K.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.219-224,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
2.

Conference Proceedings
Conference Proceedings
2. Eye-type scanning mirror with dual vertical combs for laser display
Ko, Y.-C. ; Cho, J.-W. ; Mun, Y.-K. ; Jeong, H.-G. ; Choi, W.-K. ; Lee, J.-H. ; Kim, J.-W. ; Yoo, J.-B.
Pub. info.: MOEMS Display and Imaging Systems III.  pp.14-22,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5721