1.

Conference Proceedings
Conference Proceedings
1. Measurement of lens aberration by using in-situ interferometer and classification of lens for correct application
Seong,N. ; Yeo,G. ; Cho,H. ; Moon,J.
Pub. info.: Optical microlithography XIII : 1-3 March 2000, Santa Clara, USA.  Part1  pp.30-39,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4000
2.

Conference Proceedings
Conference Proceedings
2. Emergence of assist feature OPC era in sub-130-nm DRAM devices
Kim,B. ; Kim,I. ; Yeo,G. ; Lee,J. ; Choi,J. ; Cho,H. ; Moon,J.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.452-459,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
3.

Conference Proceedings
Conference Proceedings
3. Lithography process design for 4-Gb DRAM of 0.31 k1 with KrF
Park,J. ; Yeo,G. ; Kim,I. ; Kim,B.-S. ; Lee,J. ; Cho,H. ; Moon,J.T.
Pub. info.: Optical Microlithography XIV.  4346  pp.205-213,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346