1.

Conference Proceedings

Conference Proceedings
Yedur, S. ; Vuong, V. ; Shivaprasad, D. ; Sarathy, T. P. ; Tabet, M. ; Korlahalli, R. ; Hu, J.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59924I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992
2.

Conference Proceedings

Conference Proceedings
Lee, K. ; Yedur, S. ; Cheng, W. ; Tovassoli, M. ; Baik, K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology XIII.  pp.628313-628313,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6283
3.

Conference Proceedings

Conference Proceedings
Lee, K. ; Yedur, S. ; Tavassoli, M. ; Baik, K. ; Tabet, M.
Pub. info.: Photomask Technology 2006.  pp.63490M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
4.

Conference Proceedings

Conference Proceedings
Cho, S. ; Yedur, S. ; Kwon, M. ; Tabet, M.
Pub. info.: Photomask Technology 2006.  pp.63492I-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349
5.

Conference Proceedings

Conference Proceedings
Lee, M. K. ; Yedur, S. ; Hetzer, D. ; Tavassoli, M. ; Baik, K.
Pub. info.: EMLC 2006 : 22nd European Mask and Lithography Conference : 23-26 January 2006, Dresden, Germany.  pp.62810Z-,  2006.  Bellingham, Wash.,.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6281
6.

Conference Proceedings

Conference Proceedings
Lee, K. M. ; Yedur, S. ; Henrichs, S. ; Tavassoli, M.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.61521P-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152
7.

Conference Proceedings

Conference Proceedings
Lee, K. M. ; Yedur, S. ; Tabet, M. ; Tavassoli, M.
Pub. info.: 25th Annual BACUS Symposium on Photomask Technology.  pp.59921I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5992