1.

Conference Proceedings
Conference Proceedings
1. Quality innovation of SIMOX wafers by low dose and high temperature oxidation techniques
Tachimori, M ; Masui, S ; Nakajima, T ; Kawamura, K ; Hamaguchi, I ; Yano, T ; Nagatake, Y
Pub. info.: Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices.  pp.53-62,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-3
2.

Conference Proceedings
Conference Proceedings
2. Fabrication of multifunctional optical waveguides by capillary-electrophoresis doping technique [6123-33]
Yano, T ; Taguchi, J ; Segawa, H ; Shibata, S
Pub. info.: Integrated Optics: Devices, Materials, and Technologies X.  pp.61230W-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6123