1.

Conference Proceedings

Conference Proceedings
Fujita,T. ; Nonaka,H. ; Yang,C.-S. ; Kondo,H. ; Mori,Y. ; Amasaka,Y.
Pub. info.: Smart Structures and Materials 1998: Smart Structures and Integrated Systems.  Part 2  pp.584-595,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3329
2.

Conference Proceedings

Conference Proceedings
Ding,G.-F. ; Zhao,X.-L. ; Yu,A. ; Yang,C.-S. ; Cai,B. ; Yao,X.
Pub. info.: Micromachining and Microfabrication.  pp.224-230,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230
3.

Conference Proceedings

Conference Proceedings
Yang,C.-S. ; Ding,G.-F. ; Yao,X. ; Zhao,X.-L.
Pub. info.: Micromachining and Microfabrication.  pp.218-223,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4230