1.

Conference Proceedings

Conference Proceedings
Chang, E. Y. ; Luo, G. ; Yang, T. H.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.95-99,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-02
2.

Conference Proceedings

Conference Proceedings
Yang, M. ; Lin, F. ; Yang, E. ; Yang, T. H. ; Chen, K. C. ; Ku, J. ; Lu, C. Y.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.1437-1448,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
3.

Conference Proceedings

Conference Proceedings
Chen, L J. ; Wu, W. W. ; Lee, S. W. ; Chen, H. ; Yang, T. H.
Pub. info.: Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology.  pp.241-252,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-02
4.

Conference Proceedings

Conference Proceedings
Huang, V. ; Wu, T. S. ; Yang, M. ; Lin, F. ; Yang, E. ; Yang, T. H. ; Chen, K. C. ; Ku, J. ; Lu, C. Y.
Pub. info.: Optical Microlithography XIX.  pp.61543Q-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
5.

Conference Proceedings

Conference Proceedings
Jung, S. ; Yang, E. ; Yang, T. H. ; Chen, K. C. ; Ku, J. ; Lu, c.-y.
Pub. info.: Optical Microlithography XIX.  pp.61542F-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154