1.

Conference Proceedings
Conference Proceedings
1. Highly reflective thin film coatings for high power applications of micro scanning mirrors in the NIR-VIS-UV spectral region [5963-40]
Sandner, T. ; Schmidt, J. U. ; Schnenk, H. ; Lakner, H. ; Yang, M. ; Gatto, A. ; Kaiser, N. ; Braun, S. ; Foltyn, T. ; Leson, A.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.596314-596314,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
2.

Conference Proceedings
Conference Proceedings
2. VUV optical coatings for the next-generation micro-mechanical mirrors [5963-75]
Yang, M. ; Gatto, A. ; Kaiser, N. ; Schmidt, J. U. ; Sandner, T. ; Heber, J. ; Schenk, H. ; Lakner, H.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.596322-596323,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
3.

Conference Proceedings
Conference Proceedings
3. Aluminum-enhanced optical coatings for the VUV spectral range [5963-22]
Yang, M. ; Gatto, A. ; Kaiser, N.
Pub. info.: Advances in optical thin films II : 13-15 September 2005, Jena, Germany.  pp.59630M-,  2005.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5963
4.

Conference Proceedings
Conference Proceedings
4. Suppressed Phosphorus Autodoping in Silicon Epitaxy for Ultrasharp Phosphorus Profiles by Low Temperature Rapid Thermal Chemical Vapor Deposition
Carroll, M. ; Yang, M. ; Storm, J.C.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.319-326,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
5.

Conference Proceedings
Conference Proceedings
5. Etching Temperature and Via Resistance
Yang, M. ; Zuang, J. ; Zhou, A. ; Li, L.
Pub. info.: Plasma processing XIII : proceedings of the international symposium.  pp.368-373,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-6
6.

Conference Proceedings
Conference Proceedings
6. The Impact of Silicon Substrate Degradation and Contamination at Sidewall Etch on DRAM Pause Time
Yang, M. ; Huang, J.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.167-172,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
7.

Conference Proceedings
Conference Proceedings
7. Investigation of CH2F2 Chemistry for Self-Aligned Contact Etch
Huang, J. ; Yang, M.
Pub. info.: Plasma etching processes for sub-quarter micron devices : proceedings of the international symposium.  pp.246-250,  1999.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-30
8.

Conference Proceedings
Conference Proceedings
8. Mechanisms and Applications of the Control of Dopant Profiles in Silicon Using Si 1-x-y Ge xC y Layers Grown by RTCVD
Sturm, J.C. ; Carroll, M.S. ; Yang, M. ; Gray, J. ; Stewart, E.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.309-320,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
9.

Conference Proceedings
Conference Proceedings
9. High-speed lateral PIN photodiodes in silicon technologies
Schaub, J.D. ; Koester, S.J. ; Dehlinger, G. ; Ouyang, Q.C. ; Guckenberger, D. ; Yang, M. ; Rogers, D.L. ; Chu, J. ; Grill, A.
Pub. info.: Semiconductor photodetectors : 28-29 January 2004, San Jose, California, USA.  pp.1-11,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5353
10.

Conference Proceedings
Conference Proceedings
10. Real-time storage of high-speed CCD image stream based on computer bus
Ren, G.Q. ; Wu, Q.Z. ; Yang, M. ; Jiang, P.
Pub. info.: Electronic imaging and multimedia technology III : 15-17 October, 2002, Shanghai, China.  pp.436-440,  2002.  Bellingham, Washington.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4925