1.

Conference Proceedings
Conference Proceedings
1. GT40A: durable 45-W ArF injection-lock laser light source fordryjimmersion lithography [6154-99]
Tanaka, S. ; Tsushima, H. ; Nakaike, T. ; Yamazaki, T. ; Saito, T. ; Tomaru, H. ; Kakizaki, K. ; Matsunaga, T. ; Suzuki, T. ; Wakabayashi, O. ; Nagai, S. ; Fujimoto, J. ; Inoue, T. ; Mizoguchi, H
Pub. info.: Optical Microlithography XIX.  pp.61542O-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154
2.

Conference Proceedings
Conference Proceedings
2. PEAK-TO-PEAK VOLTAGE (Vp-p) ON Rf POWERED-ELECTRODE AND SENSITIVITY OF AMORPHOUSE SILICON (A-Si) PHOTORECEPTOR
Yamazaki, T. ; Kobayashi, N. ; Takahashii, S. ; Nakanishi, T.
Pub. info.: Amorphous silicon technology, 1990 : symposium held April 17-20, 1990, San Francisco, California, U.S.A..  pp.435-440,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 192
3.

Conference Proceedings
Conference Proceedings
3. PROPERTIES OF DOPED a-Si:H FILMS DEPOSITED BY ECR PLASMA CVD
Murai, H. ; Hayama, M. ; Kobayashi, K. ; Yamazaki, T.
Pub. info.: Chemical perspectives of microelectronic materials II : symposium held November 26-28, 1990, Boston, Massachusetts, U.S.A..  pp.283-288,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 204
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Conference Proceedings
Conference Proceedings
4. *PHOTO-EXCITED CLEANING OF SILICON WITH CHLORINE AND FLUORINE
Ito, T. ; Sugino, R. ; Sato, Y. ; Okuno, M. ; Osawa, A. ; Aoyama, T. ; Yamazaki, T. ; Arimoto, Y.
Pub. info.: Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 1992, San Francisco, California, U.S.A..  pp.195-206,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 259
5.

Conference Proceedings
Conference Proceedings
5. Hyper-numerical aperture imaging challenges for 193 nm
Mizoguchi, H. ; Inoue, T. ; Fujimoto, J. ; Yamazaki, T. ; Suzuki, T. ; Matsunaga, T. ; Sakanishi, S. ; Kaminishi, M. ; Watanabe, Y. ; Ohta, T. ; Nakane, M. ; Moriya, M. ; Nakaike, T. ; Shinbori, M. ; Yoshino, M. ; Kawasuji, T. ; Nogawa, H. ; Ito, T. ; Umeda, H. ; Tanaka, S. ; Taniguchi, H. ; Sasaki, Y. ; Kinoshita, J. ; Abe, T. ; Tanaka, H. ; Hayashi, H. ; Miyao, K. ; Niwano, M. ; Kurosu, A. ; Yashiro, M. ; Nagano, H. ; Matsui, N. ; Mimura, T. ; Kakizaki, K. ; Goto, M.
Pub. info.: Optical microlithography XVIII : 1-4 March, 2005, San Jose, California, USA.  pp.69-79,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5754
6.

Conference Proceedings
Conference Proceedings
6. Advanced process control for deep sub-100nm gate fabrication
Goto, T. K. ; Tajima, M. ; Harada, F. ; Kato, T. ; Yamazaki, T. ; Taguchi, T.
Pub. info.: Data analysis and modeling for process control II : 3-4 March, 2005, San Jose, California, USA.  pp.18-28,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5755
7.

Conference Proceedings
Conference Proceedings
7. Relaxation of Thermal Stresses in Planar SOFC Stacks
Yamazakl, Y. ; Namikawa, T. ; Oishi, N. ; Yamazaki, T.
Pub. info.: Proceedings of the Fourth International Symposium on Solid Oxide Fuel Cells (SOFC-IV).  pp.236-244,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-1
8.

Conference Proceedings
Conference Proceedings
8. Phased Array Antenna for Telemetry System
Fukutani, K. ; Yamazaki, T. ; Sunaoka, M.
Pub. info.: AP 2000 : millennium Conference on Antennas & Propagation, Davos, Switzerland, 9-14 April 2000.  2000.  Noordwijk, Netherlands.  ESA Publications Division
Title of ser.: ESA SP
Ser. no.: 444
9.

Conference Proceedings
Conference Proceedings
9. VISCOSITIES OF ALKALI CARBONATE MELTS FOR MCFC
Sato, Y. ; Yamamura, T. ; Zhu, H. ; Endo, M. ; Yamazaki, T. ; Kato, H. ; Ejima, T. ; Janz, G.J.
Pub. info.: Proceedings of the Third International Symposium on Carbonate Fuel Cell Technology.  pp.416-428,  1993.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1993-3
10.

Conference Proceedings
Conference Proceedings
10. Performance of a novel 43-cm x 43-cm flat-panel detector with CsI:Tl scintillator
Yamazaki, T. ; Tamura, T. ; Nokita, M. ; Okada, S. ; Hayashida, S. ; Ogawa, Y.
Pub. info.: Medical Imaging 2004: Physics of Medical Imaging.  pp.379-385,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5368