1.

Conference Proceedings
Conference Proceedings
1. Characteristics of CD measurement equipment
Yamane,T. ; Hirano,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.531-536,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
2.

Conference Proceedings
Conference Proceedings
2. New detailed CD measurement method by scanning confocal laser microscope
Yamane,T. ; Hirana,T.
Pub. info.: Photomask and X-Ray Mask Technology V.  pp.420-428,  1998.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3412
3.

Conference Proceedings
Conference Proceedings
3. CD measurement for next-generation mask
Yamane,T. ; Hirano,T.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.604-611,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409
4.

Conference Proceedings
Conference Proceedings
4. 6-kW and 10-kW high-power lamp-pumped MOPA Nd:YAG Laser systems
Ishida,T. ; Togawa,T. ; Morita,H. ; Suzuki,Y. ; Okino,K. ; Takenaka,K. ; Kubota,K. ; Washio,K. ; Yamane,T.
Pub. info.: High-Power Lasers in Manufacturing.  pp.568-576,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3888