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Thermal and Thermoelectric Properties of III-Nitride and III-Oxynitride Films Prepared by Reactive RF Sputtering

Author(s):
Publication title:
Thermoelectric materials 2003--research and applications : symposium held December 1-3, 2003, Boston, Massachusetts, U.S.A
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
793
Pub. Year:
2004
Page(from):
351
Page(to):
358
Pages:
8
Pub. info.:
Warrendale, Pa.: Materials Research Society
ISSN:
02729172
ISBN:
9781558997318 [1558997318]
Language:
English
Call no.:
M23500/793
Type:
Conference Proceedings

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