1.

Conference Proceedings
Conference Proceedings
1. Corrosion Control in Copper Damascene Process
Homma, Yashio ; Kondo, Seiichi ; Sakuma, Noriyuki ; Hinode, Kenji ; Noguchi, Junji ; Ohashi, Naofumi ; Yamaguchi, Hizuru ; Owada, Nabuo
Pub. info.: Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium.  pp.83-93,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-37
2.

Conference Proceedings
Conference Proceedings
2. IN-SITU TEM OBSERVATION OF DEFECTS AND AMORPHOUS PHASE IN Si WAFER DURING ION IMPLANTATION
Shigenaka, Naoto ; Hashimoto, Tuneyuki ; Fuse, Motomasa ; Owada, Nobuo ; Yamaguchi, Hizuru ; Ozono, Seiko
Pub. info.: Phase formation and modification by beam-solid interactions : symposium held December 2-6, 1991, Boston, Massachusetts, U.S.A..  pp.71-76,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 235