1.

Conference Proceedings

Conference Proceedings
Y.-K. Hong ; J.-H. Song ; Y.-J. Kang ; I.-K. Kim ; J.-G. Park ; H.-S. Song ; K.-S. Kim ; J.-J. Myung ; H.-J. Lee ; S.-Y. Song
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.333-340,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)
2.

Conference Proceedings

Conference Proceedings
J.-H. Song ; Y.-K. Hong ; T.-G. Kim ; Y.-J. Kang ; I.-K. Kim ; J.-H. Han ; J.-G. Park ; A. A. Busnaina
Pub. info.: Cleaning Technology in Semiconductor Device Manufacturing IX.  pp.341-348,  2006.  Pennington, NJ.  Electrochemical Society
Title of ser.: ECS transactions
Ser. no.: 1(3)