1.

Conference Proceedings

Conference Proceedings
H. Zhang ; P.C. Qu ; Y. Sakaguchi ; H. Toda ; M. Kobayashi
Pub. info.: THERMEC 2009, 6th International Conference on PROCESSING & MANUFACTURING OF ADVANCED MATERIALS, Berlin, Germany, August 25-29, 2009.  pp.378-383,  2010.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 638-642
2.

Conference Proceedings

Conference Proceedings
K. Nishimura ; Y. Sakaguchi ; E. Crosson ; E. Wahl ; C. Rella
Pub. info.: Photomask and next-generation lithography mask technology XIV.  2007.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6607