1.

Conference Proceedings
Conference Proceedings
1. Enabling Single-Wafer Process Technologies for Reliable Ultra-Thin Gate Dielectrics
Miner, G. ; Xing, G. ; Joo, H.S. ; Sonchez, F. ; Yokoa, Y. ; Chen, C. ; Lopes, D. ; Balakrishna, A.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.3-14,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
2.

Conference Proceedings
Conference Proceedings
2. Dilute Steam Rapid Thermal Oxidation for 30 A Gate Oxides
Reid, K.G. ; Tseng, H. ; Hegde, R. ; Miner, G. ; Xing, G.
Pub. info.: Advances in rapid thermal processing : proceedings of the symposium.  pp.23-30,  1999.  Pennington, N. J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 99-10
3.

Conference Proceedings
Conference Proceedings
3. CD variations from nontrivial mask-related factors
Ma, Z.M. ; Kim, W.D. ; Rathsack, B.M. ; Xing, G. ; Somervell, M.H. ; Hong, H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology IX.  pp.677-683,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4754