1.

Conference Proceedings
Conference Proceedings
1. PREPARATION AND CHARACTERIZATION OF LPCVD TiB2 THIN FILMS
Choi, Chang ; Ruggles, G. A. ; Osburn, C. M. ; Shea, P. ; Xing, G. C.
Pub. info.: Advanced metallizations in microelectronics : symposium held April 16-20, 1990, San Francisco, California, U.S.A..  pp.455-462,  1990.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 181
2.

Conference Proceedings
Conference Proceedings
2. Ultrathin NO/N2O oxynitride dielectric for advanced flash memory application: Single wafer and batch technology
Zonca, R. ; Crivelli, B. ; Polignano, M. L. ; Cazzaniga, F. ; Alessandri, M. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D. ; Nesso, S.
Pub. info.: Structure and electronic properties of ultrathin dielectric films on silicon and related structures : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A..  pp.141-,  2000.  Warrendale, PA.  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 592
3.

Conference Proceedings
Conference Proceedings
3. Characterization of nitrided silicon-silicon dioxide interfaces
Polignano, M. L. ; Alessandri, M. ; Brazzelli, D. ; Crivelli, B. ; Ghidini, G. ; Zonca, R. ; Caricato, A. P. ; Bersani, M. ; Sbetti, M. ; Vanzetti, L. ; Xing, G. C. ; Miner, G. E. ; Astici, N. ; Kuppurao, S. ; Lopes, D.
Pub. info.: Nondestructive methods for materials characterization : symposium held November 29-30, 1999, Boston, Massachusetts, U.S.A..  pp.207-,  2000.  Warrendale, Pa..  MRS-Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 591
4.

Conference Proceedings
Conference Proceedings
4. Uniform Ultrathin Oxides Grown by Rapid Thermal Oxidation of Silicon in N2O Ambient
Xing, G. C. ; Lopes, D. ; Miner, G. E.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.361-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
5.

Conference Proceedings
Conference Proceedings
5. Nitric Oxide Rapid Thermal Nitridation of Thin Gate Oxides
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. E. ; Lopes, D.
Pub. info.: Rapid thermal and integrated processing VI : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.381-,  1997.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 470
6.

Conference Proceedings
Conference Proceedings
6. Application of Ripple Pyrometry on Integra Rapid Thermal CVD Cluster Tools
Xing, G. C. ; Wang, Z. H. ; Schietinger, C. ; Wasserman, Y. ; Sun, M. H.
Pub. info.: Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A..  pp.119-,  1995.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 387
7.

Conference Proceedings
Conference Proceedings
7. Nitrogen Profile Engineering in Thin Gate Oxides
Kuehne, J. ; Hattangady, S. ; Piccirillo, J. ; Xing, G. C. ; Miner, G. ; Lopes, D. ; Tauber, R.
Pub. info.: Rapid thermal and integrated processing VII : symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.181-,  1998.  Pittsburgh, PA.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 525