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CHARACTERIZATION OF SILICON-GATE CMOS/SOS INTEGRATED CIRCUITS PROCESSED WITH ION IMPLANTATION

Author(s):
Woo, D. S. ( RCA Corporation )  
Publication title:
NASA Technical Reports
Pub. Year:
1982
Issue:
NASA-CR-161988
No.:
G3/33 19720
Pt.:
NAS 1.26:161988
Paper no.:
N84-29087
Page(from):
1
Page(to):
18
Pages:
18
Pub. info.:
National Aeronautics and Space Administration
Language:
English
Type:
Technical Paper

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