1.

Conference Proceedings
Conference Proceedings
1. Impact of nitrogen ion implantation on deep submicron SALICIDE process
Lim,C.W, ; Lahiri,S.K. ; Tung,C.H. ; Wong,S.M. ; Lee,K.H. ; Wong,H. ; Pey,K.L. ; Chan,L.H.
Pub. info.: Microelectronic Device Technology : 1-2 October 1997, Austin, Texas.  pp.151-161,  1997.  Bellingham, Wash., USA.  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3212
2.

Conference Proceedings
Conference Proceedings
2. Effect of argon or nitrogen preamorphized implant on SALICIDE formation for deep submicron CMOS technology
Ho,C.S. ; Pey,K.L. ; Wong,H. ; Karunasiri,R.P.G. ; Chua,S.J. ; Lee,K.H. ; Tang,Y. ; Wong,S.M. ; Chan,L.H.
Pub. info.: Microlithographic Techniques in IC Fabrication.  pp.243-254,  1997.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3183