Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA. pp.55-66, 2004. Bellingham, Wash., USA. SPIE - The International Society of Optical Engineering
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Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA. pp.134-141, 2003. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
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