1.

Conference Proceedings

Conference Proceedings
Wang, J. ; Wong, A.K.K. ; Lam, E.Y.
Pub. info.: Design and process integration for microelectronic manufacturing II [sic] : 26-27 February 2004, Santa Clara, California, USA.  pp.55-66,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5379
2.

Conference Proceedings

Conference Proceedings
Wang, J. ; Wong, A.K.K.
Pub. info.: Cost and performance in integrated circuit creation : 27-28 February 2003, Santa Clara, California, USA.  pp.134-141,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5043
3.

Conference Proceedings

Conference Proceedings
Pierrat, C. ; Wong, A.K.K.
Pub. info.: Optical Microlithography XVI.  Part One  pp.193-202,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5040