MEMS components and applications for industry, automobiles, aerospace, and communication : 22-23 October 2001, San Francisco, USA. pp.130-137, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Materials science for high technologies : MASHTEC '90 : proceedings of the International Symposium held in Dresden, German Democtatic Republic April 24-27, 1990. Pt.2 pp.489-490, 1990. Aedermannnsdorf, Switzerland. Trans Tech Publications