1.

Conference Proceedings
Conference Proceedings
1. Design of rotating MEMS tunable capacitors for use at rf and microwave frequencies
Wilson, J.M. ; Bashirullah, R. ; Nackashi, D.P. ; Winick, D.A. ; Duewer, B.E. ; Franzon, P.D.
Pub. info.: Design, characterization, and packaging for MEMS and microelectronics II : 17-19 December, 2001, Adelaide, Australia.  pp.186-197,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4593
2.

Conference Proceedings
Conference Proceedings
2. Improving interconnect characteristics of thin film MEMS processes
Duewer, B.E. ; Winick, D.A. ; Oberhofer, A.E. ; Muth, J. ; Franzon, P.D.
Pub. info.: Device and process technologies for MEMS and Microelectronics II : 17-19 December 2001, Adelaide, Australia.  pp.196-204,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4592