1.
|
Conference Proceedings
|
Neef, C.J. ; Krishnamurthy, V. ; Nagatkina, M.I. ; Bryant, E. ; Windsor, M. ; Nesbit, C.
Pub. info.: |
Advances in Resist Technology and Processing XXI. pp.684-688, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5376 |
|
2.
|
Conference Proceedings
|
Neef, C.J. ; Fowler, M.R. ; Windsor, M. ; Nesbit, C.
Pub. info.: |
Advances in Resist Technology and Processing XX. 2 pp.872-877, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|