1.

Conference Proceedings
Conference Proceedings
1. Microfabrication of Membrane-Based Devices by Deep-Reactive Ion Etching (DRIE) of Silicon
Manginell, Ronald P. ; Frye-Mason, Gregory C. ; Kent Schubert, W. ; Schul, Randy J. ; Willison, Christi G.
Pub. info.: Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV.  pp.62-69,  1998.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 98-14
2.

Conference Proceedings
Conference Proceedings
2. Inductively Coupled High-Density Plasma-Induced Etch Damage Of GaN MESFETs
Shul, Randy J. ; Zhang, L. ; Baca, A.G. ; Willison, Christi G. ; Hans, J. ; Pearton, S.J. ; Lee, K.P. ; Ren, F.
Pub. info.: Wide-bandgap electronic devices.  pp.T7.5-,  2001.  Warrendale, PA..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 622