RF AEROSOL MIST PLASMA DEPOSITION OF OXIDE FILMS
- Author(s):
Williams, J. A. A. Shen, C. Q. Vuong, K. D. Tenpas, E. Condrate, R. A., Sr. Lee, D. H. Wang, H. Fagan, J. Wang, X. W. Stuckey, J. DeMarco, M. Yu, W. Petrou, A. - Publication title:
- Evolution of thin film and surface structure and morphology : symposium held November 28-December 2, 1994, Boston, Massachusetts, USA
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 355
- Pub. Year:
- 1995
- Page(from):
- 563
- Pub. info.:
- Pittsburgh, Pa.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992566 [1558992561]
- Language:
- English
- Call no.:
- M23500/355
- Type:
- Conference Proceedings
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